1st American Workshop on Ellipsometry

February 28 – March 3, 2027, in Lincoln, NE

Keynote & Invited Speakers

From Monday through Wednesday, March 1–3, 2027, Oral and Poster Sessions will take place in the Conference Center on the Nebraska Innovation Campus, including an outstanding Keynote and a lineup of excellent Invited Speakers.  The Keynote is intended to provide a high-level overview, summarizing developments in ellipsometry and related techniques over the past ~5 years, and looking ahead at a broad range of applications that will drive future advances.  Invited Talks are intended to introduce advanced concepts in instrumentation and data analysis, as well as specialized applications, that are highly topical or emerging.

Please find the up-to-date Schedule of Events in the Abstract Book.


Keynote

KLA Corporation

Film and Critical Dimension Metrology Challenges in the Semiconductor Industry

Shankar Krishnan received his Ph.D. from Rice University, where he developed novel spectroscopic ellipsometers to study high-temperature liquid materials.  He was a Director and Principal Scientist at Containerless Research, Inc., where he developed a series of high-speed polarimeters and ellipsometers to study transient events on millisecond/microsecond timescales.  Since 2001, he has worked at KLA Corporation, where he has led the development of numerous spectroscopic ellipsometers and reflectometers for film and critical dimension metrology.  He currently serves as a KLA Fellow and Vice President of Engineering.  He has published widely on spectroscopic ellipsometry and high-speed polarimetry, and holds over 110 patents.


Invited Speakers

Hiroyuki Fujiwara

Gifu University, Japan

Advances in Deep Learning-Based Spectroscopic Ellipsometry

Hiroyuki Fujiwara received his Ph.D. degree from the Tokyo Institute of Technology.  He was a research associate at The Pennsylvania State University during 1996–1998.  In 1998, he joined the Electrotechnical Laboratory of the Ministry of International Trade and Industry in Japan.  Later in 2007, he became a team leader of the Research Center for Photovoltaics at the National Institute of Advanced Industrial Science and Technology (AIST) in Japan.  He is currently a Professor in the Department of Electrical, Electronic, and Computer Engineering at Gifu University.

Argonne National Laboratory

In Situ Combination of Spectroscopic Ellipsometry and Calorimetry

Ashley Bielinski received her bachelor’s degree in Mechanical Engineering from the University of Minnesota, Twin Cities, in 2014;  and her master’s and Ph.D. degrees in Mechanical Engineering from the University of Michigan in 2019.  She currently works as an Assistant Materials Scientist at Argonne National Laboratory.  Her research centers around atomic layer deposition, a surface synthesis technique that uses sequential surface reactions to deposit material onto a surface in a vacuum chamber.  She developed a new technique for studying ALD reactions that combines in situ ellipsometry with calorimetry measurements.  She was recognized with an NSF Graduate Research Fellowship 2015-2018, the Maria Goeppert Mayer Postdoctoral Fellowship 2019-2022, and the Physical Sciences and Engineering Early Investigator Named Award by Argonne National Laboratory 2022.

Brigham Young University

Multi-Instrument Characterization of Thin Films: How and Why Ellipsometry Matters

Matthew Linford graduated with a B.S. in Chemistry from Brigham Young University (BYU) in 1990 and received M.S. and Ph.D. degrees in Materials Science & Engineering and Chemistry, respectively, from Stanford University in 1996.  After a Post-Doc at the Max Planck Institute of Colloids and Interfaces in Golm (previously Berlin), Germany, with Helmut Möhwald studying polyelectrolyte multilayers, he worked in industry for three years.  In 2000, he took a position as a faculty member at BYU and is now a full professor.  While at BYU, he has studied thin-film characterization using X-ray photoelectron spectroscopy and spectroscopic ellipsometry; statistical methods for data analysis; new materials for separations science (chromatography); thin-film deposition by atomic layer deposition and sputtering; new materials for long-term digital data storage; and the chemomechanical functionalization of silicon.  He has more than 400 publications, which include peer-reviewed papers, conference proceedings, book chapters, peer-reviewed contributions to Surface Science Spectra, commercial application notes, tutorial articles, and more than 40 patents.  In 2014, he became a Fellow of the American Vacuum Society (AVS).

Connie B. Roth

Emory University

Ellipsometry in Polymer Physics

Connie Barbara Roth received her B.Sc. in Physics from McMaster University (Ontario, Canada), and her M.Sc. and Ph.D. in Physics from the University of Guelph (Ontario, Canada).  She completed postdoctoral positions at Simon Fraser University (British Columbia, Canada) and Northwestern University (Chicago, IL).  She has been a faculty member at Emory University since 2007, receiving tenure in 2013, and was promoted to full professor in the Department of Physics in 2021.  Her research falls under the area of Experimental Soft Matter Physics.  Her research interests include polymer materials, glass transition, physical aging, photophysics, miscibility, and phase separation, with particular interest in surface and interfacial effects observed at the nanoscale in thin films, nanostructured blends, and nanocomposite materials, as well as other perturbations such as external stresses and electric fields.  In 2016, she published an edited book on “Polymer Glasses” (CRC Press).

Anis Attiaoui

Stanford University

Spectroscopic Ellipsometry Across Length Scales: Quantum Confinement, Thermal Segregation, and Oxide Chemistry in Group-IV Heterostructures

Anis Attiaoui obtained his Ph.D. in Physics Engineering from École Polytechnique de Montréal, Canada, in January 2023, conducting research under the supervision of Prof. Oussama Moutanabbir. He is currently a postdoctoral fellow in the Department of Materials Science and Engineering at Stanford University, where he works under the mentorship of Prof. Paul McIntyre. He specializes in the epitaxial growth of group-IV semiconductors via chemical vapor deposition and the optoelectronic characterization of materials, employing methods such as photoluminescence, photoreflectance, and absorption spectroscopy. He explores how short-range ordering affects the optical properties of semiconductor materials by integrating Extended X-ray Absorption Fine Structure analysis with photoluminescence spectroscopy. He is also leading a project at Stanford focused on creating innovative two-dimensional metasurfaces designed to enhance light emission and absorption in the near-infrared to mid-infrared spectral regions, utilizing group-IV semiconductor nanowires.

Onto Innovation

Optical Critical Dimension Metrology with Spectroscopic Ellipsometry: The Workhorse of Process Control in Advanced Nodes

Nick Keller received his B.S. in Electrical Engineering from UC Santa Barbara in 2007.  Since 2007, he has worked for Nanometrics, which merged with Rudolph Technologies to become Onto Innovation in 2019.  He is now a Director of Applications Development and has been instrumental in developing infrared critical-dimension technology and in providing pathfinding simulations to support other new products at the pre-initiation phase.  He has seven issued patents and over 25 publications.


Catering during Session Breaks

Refreshments will be served during Oral Session breaks and during Poster Sessions.  Lunch will be served on Monday and Tuesday.

  • First Announcement

    Dear Ellipsometry Community in North America,

    We look forward to welcoming you to the 1st American Workshop on Ellipsometry (AWE-1) to be held February 28 – March 3, 2027, in Lincoln, Nebraska.  Lincoln offers a rich history of more than 100 years in the science and engineering of ellipsometry.  The venue will be located on the Nebraska Innovation Campus.

    AWE-1 will be the inaugural workshop & exhibition organized and sponsored by the North American Ellipsometry Association (NAEA).  This meeting aims to bring together experienced leaders, early-career professionals, and especially students from various academic, public, and industrial sectors.  The main purpose is to provide a forum for beginners and experts alike to learn, exchange, and share scientific and technological knowledge, as well as recent advancements, regarding ellipsometry and related techniques.  International participants are welcome and expressly encouraged.

    The Organizing Committee consists of:  Eva Schubert (University of Nebraska-Lincoln), Megan Stokey (Milwaukee School of Engineering), Alyssa Mock (Weber State University), Marcel Junige (University of Colorado Boulder), Rafał Korlacki (J. A. Woollam Co., Inc.), Ufuk Kılıç (University of Nebraska-Lincoln), Preston Sorensen (University of Nebraska-Lincoln), Yousra Traouli (University of Nebraska-Lincoln), and Mathias Schubert (University of Nebraska-Lincoln).  Additional Committees for specific tasks are still being formed and will be announced soon.  Volunteers are cordially invited!

    Distinguished Tutorial and Invited Speakers are anticipated to cover ellipsometry fundamentals, as well as more specialized applications.  A Call for Abstracts, including detailed submission instructions, will be circulated soon.

    Exhibitor information and a Prospectus for sponsorship opportunities are currently in preparation and will be provided very soon.

    Meanwhile, please mark your calendars and stay tuned for further announcements!  We will disseminate all information via the AWE-1 website, the NAEA LinkedIn Group, and an AWE-1 email newsletter.

    We look forward to seeing you in Lincoln, NE, in early 2027!

    Best regards,
    Eva, Megan, Alyssa, Marcel, Rafał, Ufuk, Preston, Yousra, and Mathias
    AWE-1 Organizing Committee